Prepare-code-coverage-artifact.py failed with error "no profile can be merged"

I 've added cmake configuration -DLLVM_BUILD_INSTRUMENTED_COVERAGE=On to collect code coverage of llvm-projects.

I ran several programs and I can see several .profraw files in path/to/build/profile. Then I run prepare-code-coverage-artifact.py, it fails with following message:

:: Merging raw profiles...warning: profiles/211893673146847566_2.profraw: unsupported instrumentation profile format version
warning: profiles/6960266891089287575_0.profraw: unsupported instrumentation profile format version
warning: profiles/211893673146847566_1.profraw: unsupported instrumentation profile format version
error: no profile can be merged
Traceback (most recent call last):
  File "/Users/haoyu/workspace/mlir-fuzz/build/../llvm/utils/prepare-code-coverage-artifact.py", line 106, in <module>
    profdata_path = merge_raw_profiles(args.host_llvm_profdata,
  File "/Users/haoyu/workspace/mlir-fuzz/build/../llvm/utils/prepare-code-coverage-artifact.py", line 28, in merge_raw_profiles
    subprocess.check_call([host_llvm_profdata, 'merge', '-sparse', '-f',
  File "/Library/Frameworks/Python.framework/Versions/3.9/lib/python3.9/subprocess.py", line 373, in check_call
    raise CalledProcessError(retcode, cmd)
subprocess.CalledProcessError: Command '['bin/llvm-profdata', 'merge', '-sparse', '-f', 'profiles/profiles.manifest', '-o', 'profiles/Coverage.profdata']' returned non-zero exit status 1.